Open AccessGraphene-assisted electro-optomechanical integration on a silicon-on-insulator platform
Author(s) -
Xiang Xi,
Zefeng Chen,
Jianbin Xu,
Xiankai Sun
Publication year - 2020
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.382770
Subject(s) - optomechanics , silicon nitride , materials science , resonator , silicon , graphene , optoelectronics , silicon on insulator , nanoelectromechanical systems , coating , microelectromechanical systems , signal processing , cmos , nanotechnology , electronic engineering , digital signal processing , nanomedicine , nanoparticle , engineering
Micro- and nano-optomechanics has attracted broad interest for applications of mechanical sensing and coherent signal processing. For nonpiezoelectric materials such as silicon or silicon nitride, electrocapacitive effects with metals patterned on mechanical structures are usually adopted to actuate the mechanical motion of the micro- or nanomechanical devices. However, the metals have deleterious effects on the mechanical structures because they add an additional weight and also introduce considerable mechanical losses. To solve these problems, we have proposed and experimentally demonstrated a new scheme of electro-optomechanical integration on a silicon-on-insulator platform by using single-layer graphene as a highly conductive coating for electromechanical actuation. Mechanical modes of different groups were electrically actuated and optically detected in a micromechanical resonator, with the mechanical Q > 1000 measured in air. Compatible with CMOS technology, our scheme is suitable for large-scale electro-optomechanical integration and will have wide applications in high-speed sensing, communication, and signal processing.