Open AccessSingle-shot freeform surface profiler
Author(s) -
Yong Bum Seo,
Hyo Bin Jeong,
Hyug-Gyo Rhee,
Young-Sik Ghim,
Ki-Nam Joo
Publication year - 2020
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.380305
Subject(s) - stylus , optics , interferometry , shearing (physics) , materials science , single shot , birefringence , phase unwrapping , profilometer , phase (matter) , spatial frequency , surface roughness , acoustics , physics , quantum mechanics , composite material
We propose a novel and simple method of single-shot freeform surface profiler based on spatially phase-shifted lateral shearing interferometry. By the adoption of birefringent materials, the laterally shearing waves are simply generated without any bulky and complicated optical components. Moreover, the phase maps that lead to the 3D profile of the freeform surface can be instantly obtained by the spatial phase-shifting technique using a pixelated polarizing camera. The proposed method was theoretically described and verified by measuring several samples in comparison to the measurement results with a well-established stylus probe.