Open AccessLaser-fabricated axicons challenging the conventional optics in glass processing applications
Author(s) -
Juozas Dudutis,
Jokūbas Pipiras,
Simon Schwarz,
Stefan Rung,
Ralf Hellmann,
Gediminas Račiukaitis,
Paulius Gečys
Publication year - 2020
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.377108
Subject(s) - wafer dicing , materials science , polishing , axicon , optics , laser , fabrication , grinding , laser ablation , optoelectronics , laser beams , composite material , wafer , medicine , physics , alternative medicine , pathology
Laser-based fabrication can be an alternative technology to mechanical grinding and polishing processes. However, the performance of these elements in real applications still needs to be validated. In this paper, we demonstrate that the subtractive fabrication technology is able to produce high-quality axicons from fused silica, which can be efficiently used for glass processing. We comprehensively investigate axicons, fabricated by ultrashort pulsed laser ablation with subsequent CO 2 laser polishing, and compare their performance with commercially available axicons. We show that laser-fabricated axicons are comparable in quality with a precision commercial axicon. Furthermore, we demonstrate the intra-volume glass modification and dicing, utilising mJ-level laser pulses. We show that the tilting operation of the laser-fabricated axicons results in the formation of directional transverse cracks, which significantly enhance the 1 mm-thick glass dicing process.