Open AccessVisible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers
Author(s) -
Wesley D. Sacher,
Xianshu Luo,
Yisu Yang,
Fu-Der Chen,
Thomas Lordello,
Jason C. C. Mak,
Xinyu Liu,
Ting Hu,
Tianyuan Xue,
Patrick Lo,
M. L. Roukes,
Joyce K. S. Poon
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.037400
Subject(s) - materials science , optics , wafer , optoelectronics , waveguide , silicon , silicon nitride , wavelength , grating , photonics , physics
We present passive, visible light silicon nitride waveguides fabricated on ≈ 100 µm thick 200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of single-mode waveguides were ≤ 2.8 dB/cm and ≤ 1.9 dB/cm over continuous wavelength ranges of 466-550 nm and 552-648 nm, respectively. In-plane waveguide crossings and multimode interference power splitters are also demonstrated. Using this platform, we realize a proof-of-concept implantable neurophotonic probe for optogenetic stimulation of rodent brains. The probe has grating coupler emitters defined on a 4 mm long, 92 µm thick shank and operates over a wide wavelength range of 430-645 nm covering the excitation spectra of multiple opsins and fluorophores used for brain stimulation and imaging.