Open AccessHigh-quality single crystal diamond diffraction gratings fabricated by crystallographic etching
Author(s) -
Marcell Kiss,
Teodoro Graziosi,
Adrien Toros,
Toralf Scharf,
Christian Santschi,
Olivier J. F. Martin,
Niels Quack
Publication year - 2019
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.030371
Subject(s) - materials science , diamond , optics , diffraction , diffraction grating , etching (microfabrication) , groove (engineering) , fabrication , scanning electron microscope , diffraction efficiency , polishing , diamond turning , optoelectronics , grating , nanotechnology , layer (electronics) , composite material , medicine , physics , alternative medicine , pathology , metallurgy
We demonstrate a novel method for fabricating single crystal diamond diffraction gratings based on crystallographic etching that yields high-quality diffraction gratings from commercially available <100> diamond plates. Both V-groove and rectangular gratings were fabricated and characterised using scanning electron microscopy and atomic force microscopy, revealing angles of 57° and 87° depending on the crystal orientation, with mean roughness below R a = 5 nm on the sidewalls. The gratings were also optically characterised, showing good agreement with simulated results. The fabrication method demonstrated in this contribution shows the way for manufacturing high-quality diamond diffractive components that surpass existing devices both in quality and manufacturability.