Open AccessAll-optical, self-focused laser beam array for parallel laser surface processing
Author(s) -
Wenbiao Ge,
Cheng Xing,
Vadim P. Veiko,
Zhengyan Li
Publication year - 2019
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.029261
Subject(s) - optics , laser , materials science , femtosecond , fluence , beam parameter product , laser beam quality , distributed feedback laser , optoelectronics , laser scanning , x ray laser , silicon , laser power scaling , laser beams , physics
A single femtosecond laser beam can be focused to process material surfaces. However, the low processing efficiency by a single laser beam prevents broad applications of femtosecond laser surface processing. Here we have demonstrated an array of high-intensity femtosecond laser beams that self-focus in a piece of glass medium, enabling high-efficiency, millimeter scale parallel laser surface processing. Experimental and simulation results suggest that the laser fluence of each focused laser beamlet in the array is more than 1.2 J/cm 2 , which is sufficient for micro- or nano-structure laser processing. To prove the concept, nanoscale structures on silicon surface are generated by the self-focused laser beam array, which may improve the efficiency of black silicon fabrication for photovoltaic devices.