Open AccessFabrication of biomimetic compound eye on single crystal diamond
Author(s) -
Yan Liang,
Tianfei Zhu,
Mengjia Xi,
Yan Song,
Jiao Fu,
Dan Zhao,
Yanfeng Wang,
Juan Wang,
Kaiyue Wang
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.020508
Subject(s) - diamond , materials science , photolithography , photoresist , optics , lithography , etching (microfabrication) , fabrication , compound eye , dry etching , engraving , optoelectronics , nanotechnology , composite material , medicine , physics , alternative medicine , layer (electronics) , pathology
In this study, a biomimetic compound eye (BCE) was realized on diamond by combining thermal reflow with dry etching techniques. Firstly, photoresist pillars were developed on diamond surface by standard photolithography. Then, these pillars were reflowed on a hotplate to form spherical segment patterns. Furthermore, dry etching technique was used to transfer these patterns into diamond surface to form the convex curve surface with diameter of 300 μm, on which, ommatidia with diameter of 18 μm and space of 35 μm were fabricated with the same processes to obtain BCE. Finally, the as-fabricated diamond BCE was characterized, indicating a well-uniformity according to the point spread function and exhibiting clear images of the testing pattern in projection experiment, which is expected to work under harsh conditions such as high intensity irradiation and strong acid.