Open Access45-degree curved micro-mirror for vertical optical I/O of silicon photonics chip
Author(s) -
Akihiro Noriki,
Tsuyoshi Amano,
Daisuke Shimura,
Yosuke Onawa,
Hiroki Yaegashi,
Hirokazu Sasaki,
Masahiko Mori
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.019749
Subject(s) - optics , broadband , lens (geology) , photonics , materials science , coupling (piping) , silicon photonics , optoelectronics , silicon , optical axis , curved mirror , physics , metallurgy
The broadband vertical optical inputs/outputs (I/Os) of silicon (Si) photonics pose significant challenges in terms of practical applications. Herein, we worked on a vertical optical I/O using a 45° curved micro-mirror. To verify the optical coupling characteristics, a simulation was conducted. As a result, efficient broadband optical coupling with various types of single-mode optical fibers was obtained owing to its lens function. An integration technology of the curved mirror was also developed based on the semiconductor manufacturing process. A curved micro-mirror with a spherical surface was obtained, and the vertical optical I/O with its lens function was demonstrated experimentally.