Open Access3 degree-of-freedom resonant scanner with full-circumferential range and large out-of-plane displacement
Author(s) -
Haijun Li,
Kenn R. Oldham,
Thomas D. Wang
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.016296
Subject(s) - scanner , optics , deflection (physics) , displacement (psychology) , microelectromechanical systems , deflection angle , actuator , materials science , physics , torsion spring , acoustics , engineering , optoelectronics , electrical engineering , psychology , classical mechanics , psychotherapist
Microsystems-based scanning technologies can achieve deflection angles of several tens of degrees and translational displacements of a couple hundred microns. Emerging applications need performance with multi-fold greater torsional and translational motion. A compliant lever-based mechanism is introduced into the comb-drive actuators of a MEMS resonant scanner to achieve full-circumferential range and large out-of-plane displacement at ambient pressures. A 1.5 mm diameter mirror is demonstrated that generates 494° total deflection angle and 561 μm translational displacement at either 853 or 956 Hz and either 100 or 90V, respectively. At 40V, an optical scan angle of ~200° and translational displacement of ~310 μm are achieved.