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Optical homogeneity measurement of parallel plates by wavelength-tuning interferometry using nonuniform fast Fourier transform
Author(s) -
Ran Guo,
Zhishan Liao,
Jianxin Li,
Aobo Li,
Pingping Song,
Rihong Zhu
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.013072
Subject(s) - fast fourier transform , optics , interferometry , homogeneity (statistics) , wavelength , fourier transform , computer science , physics , algorithm , quantum mechanics , machine learning
Wavelength-tuning interferometry is commonly employed to measure the optical homogeneity of parallel plates. However, the nonlinearity of phase shifts caused by wavelength tuning errors and environmental vibration leads to a spatially uniform error in the calculated phase distribution. Herein, a wavelength-tuning interferometry method based on nonuniform fast Fourier transform (WTI-NUFFT) was developed, which solves the spectral aliasing resulting from the spatially uniform error. The characteristics of the WTI-NUFFT method were estimated through comparison with the FFT method. Both the simulated and experimental results showed that the WTI-NUFFT method can improve the accuracy of the optical homogeneity measurement of parallel plates.

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