Open AccessFabrication and analysis of tantalum pentoxide optical waveguide resonator of high thermal stability
Author(s) -
Ann-Kuo Chu,
Yuanzheng Lu,
Yuan-Yao Lin
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.006629
Subject(s) - tantalum pentoxide , materials science , resonator , optics , waveguide , cladding (metalworking) , thermal stability , optoelectronics , tantalum , refractive index , thin film , dielectric , composite material , nanotechnology , physics , quantum mechanics , metallurgy
We fabricated waveguide resonators with high thermal stability using tantalum pentoxide thin film covered with PECVD silicon dioxide cladding. Without complex athermal design, low temperature dependence of 7.4 pm/°C and 8.15 pm/°C were measured in waveguide Bragg gratings (WBG) and Fabry-Perot resonator sandwiched by a pair of identical WBG mirrors, respectively. Suggested by semi-analytical perturbation calculations, the athermal properties of tantalum pentoxide waveguide grating are attributed not only to the low thermo-optical coefficient in tantalum pentoxide thin film but also to the strong chromatic dispersion of the guided modes. Guidelines are proposed to design waveguide-based frequency devices of low thermo-optical effect without complex athermal design.