Fabrication and analysis of tantalum pentoxide optical waveguide resonator of high thermal stability | Zendy

AnnKuo Chu | Zendy; Yuyan Lu | Zendy; Yuan-Yao Lin | Zendy

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Fabrication and analysis of tantalum pentoxide optical waveguide resonator of high thermal stability

Author(s) -

AnnKuo Chu,

Yuyan Lu,

Yuan-Yao Lin

Publication year - 2019

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.27.006629

Subject(s) - tantalum pentoxide , materials science , optics , resonator , waveguide , thermal stability , cladding (metalworking) , optoelectronics , tantalum , refractive index , thin film , dielectric , nanotechnology , composite material , physics , quantum mechanics , metallurgy

We fabricated waveguide resonators with high thermal stability using tantalum pentoxide thin film covered with PECVD silicon dioxide cladding. Without complex athermal design, low temperature dependence of 7.4 pm/°C and 8.15 pm/°C were measured in waveguide Bragg gratings (WBG) and Fabry-Perot resonator sandwiched by a pair of identical WBG mirrors, respectively. Suggested by semi-analytical perturbation calculations, the athermal properties of tantalum pentoxide waveguide grating are attributed not only to the low thermo-optical coefficient in tantalum pentoxide thin film but also to the strong chromatic dispersion of the guided modes. Guidelines are proposed to design waveguide-based frequency devices of low thermo-optical effect without complex athermal design.

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