Open AccessLaser crystallized low-loss polycrystalline silicon waveguides
Author(s) -
Yohann Franz,
Antoine F. J. Runge,
Swe Zin Oo,
Gregorio Jimenez-Martinez,
Noel Healy,
Ali Z. Khokhar,
Antulio Tarazona,
Harold M. H. Chong,
S. Mailis,
Anna C. Peacock
Publication year - 2019
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.004462
Subject(s) - materials science , silicon , laser , polycrystalline silicon , etching (microfabrication) , optoelectronics , optics , fabrication , crystallization , raman spectroscopy , amorphous silicon , hybrid silicon laser , crystalline silicon , nanotechnology , medicine , chemistry , physics , alternative medicine , organic chemistry , layer (electronics) , pathology , thin film transistor
We report the fabrication of low-loss, low temperature deposited polysilicon waveguides via laser crystallization. The process involves pre-patterning amorphous silicon films to confine the thermal energy during the crystallization phase, which helps to control the grain growth and reduce the heat transfer to the surrounding media, making it compatible with CMOS integration. Micro-Raman spectroscopy, Secco etching and X-ray diffraction measurements reveal the high crystalline quality of the processed waveguides with the formation of millimeter long crystal grains. Optical losses as low as 5.3 dB/cm have been measured, indicating their suitability for the development of high-density integrated circuits.