Open Access𝛍m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer
Author(s) -
Yugang Ren,
Zhang Cao,
Xiaoyang Tang,
Hongtu Xie,
Lijun Xu
Publication year - 2019
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.002899
Subject(s) - optics , materials science , shearing interferometer , interferometry , wavelength , shearing (physics) , laser , phase (matter) , refractive index , astronomical interferometer , optoelectronics , physics , quantum mechanics , composite material
In this paper, a precise phase-shift extraction method was introduced for the first time to measure the thickness distribution of transparent glass films. A spatial light modulator modulated the phases of the incident laser in a large lateral shearing interferometer. The phase shifting caused by the thickness of the films can be extracted ranging from 0 to 2Ď€, in a recursive way suitable for real-time implementation. Incident lasers with different wavelengths were utilized to measure the spatial distribution of the thickness of the films, and they can be larger than one wavelength of the incident light. Both artificial and experimental results have verified that the resolution of the thickness measurement reaches up to 1 m.