Open AccessIn situ noncontact measurement system and two-step compensation strategy for ultra-precision diamond machining
Author(s) -
Jun Yu,
Zhengxiang Shen,
Xiaoqiang Wang,
Pengfeng Sheng,
Zhanshan Wang
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.030724
Subject(s) - compensation (psychology) , machining , diamond turning , paraboloid , process (computing) , accuracy and precision , optics , computer science , system of measurement , diamond , materials science , micrometer , machine tool , metrology , mechanical engineering , engineering , physics , surface (topology) , psychology , geometry , mathematics , quantum mechanics , astronomy , psychoanalysis , composite material , operating system
Ultra-precision diamond machining is a promising technique for non-rotationally symmetrical surfaces with sub-micrometer form accuracy. The measurement and compensation processes in the fabrication process must be conducted carefully to achieve high form accuracy. However, significant challenges remain to improve the measurement accuracy and machining efficiency. Because of the remounting process, the off-machine measurements would reduce the efficiency. On the other hand, contact-type measurements can cause physical damage to some soft materials. To overcome these problems, a noncontact on-machine measurement (OMM) system is developed using two optical probes, and a two-step compensation strategy is proposed to generate a modified tool path. To verify the accuracy of the proposed measurement system, OMMs were performed on a spherical mirror using this system and were later compared with off-machine measurements. To evaluate the compensation strategy, an off-axis paraboloid mirror was diamond-machined and compensated using the proposed method. The results show that the OMM system and compensation strategy are effective for improving the form accuracy while simultaneously enhancing the machining efficiency.