Open AccessHigh-density gas capillary nozzles manufactured by hybrid 3D laser machining technique from fused silica
Author(s) -
Vidmantas Tomkus,
Valdas Girdauskas,
Juozas Dudutis,
Paulius Gečys,
Valdemar Stankevič,
Gediminas Račiukaitis
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.027965
Subject(s) - materials science , optics , laser , nozzle , capillary action , femtosecond , machining , laser ablation , etching (microfabrication) , interferometry , laser beam machining , surface finish , surface roughness , laser cutting , nanosecond , laser beams , composite material , physics , layer (electronics) , metallurgy , thermodynamics
In this report, an efficient hybrid laser technique, nanosecond laser rear-side processing and femtosecond laser-assisted selective etching (FLSE) for the manufacturing of high-density gas capillary targets, is demonstrated. Cylindrical capillary nozzles for laser betatron X-ray sources were numerically simulated, manufactured from fused silica by 3D laser inscription and characterized using interferometry and gas density reconstruction. The dependence of gas concentration profiles on the wall roughness of cylindrical channels is presented.