Non-homogeneous composite GMR structure to realize increased filtering range

A non-homogeneous composite guided-mode resonant (GMR) filter structure is proposed that avoids the multi-mode resonance effect and increases resonant wavelength tuning range. The composite filter structure is engineered using a combination of a varied-line-spacing (VLS) grating layer with a wedge-shaped waveguide layer. The grating is fabricated by holographic interference lithography (IL), while the wedge-shaped layer is fabricated using masked ion beam etching (MIBE) technology. The resonant wavelength has been observed to vary as a function of the spatial position on the structure. In the fabricated structure, over a length of 30 mm, the grating period increment is measured to be 149.2 nm, whereas the increment of the waveguide film thickness is approximately 100 nm. Experimental results show that a primary reflectance peak is achieved spanning a wavelength range of 805.8-1119.0 nm. The device is designed using the rigorous coupled-wave analysis (RCWA) method, and the proposed device is toward the practical application of GMR filters.