Open AccessRoll angle measurement system based on differential plane mirror interferometer
Author(s) -
Kai Shi,
Junhong Su,
Wenmei Hou
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.019826
Subject(s) - optics , interferometry , reflector (photography) , physics , prism , plane mirror , metrology , curved mirror , astronomical interferometer , differential (mechanical device) , system of measurement , diagonal , measuring principle , mathematics , geometry , light source , astronomy , thermodynamics
A precision roll angle measurement system based on differential plane mirror interferometer (DPMI) is proposed and the measurement principle has been analyzed theoretically in detail. This system uses DPMI with wedgy angle prism and wedgy angle reflector to produce diagonal symmetry of the two frequency beams. The residual of nanopositioning stage and roll angle system is less than 1 μrad, which has verified the correctness of the measuring principle. As result, the stability of the roll angle measurement system is satisfactory, and the average deviation of measurement experiments is less than 5 μrad.