Open AccessSnapshot multi-wavelength interference microscope
Author(s) -
Xiaobo Tian,
Xingzhou Tu,
Junchao Zhang,
Oliver Spires,
Neal Brock,
Stanley Pau,
Rongguang Liang
Publication year - 2018
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.018279
Subject(s) - optics , polarizer , interference microscopy , wavelength , microscope , materials science , interference filter , polarizing filter , snapshot (computer storage) , optical filter , physics , computer science , birefringence , operating system
A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with /2 phase shift are captured at each wavelength for phase measurement, the 2 ambiguities are removed by using two or three wavelengths.