Open AccessPost-fabrication trimming of photonic crystal nanobeam cavities by electron beam irradiation
Author(s) -
Shoubao Han,
Yaocheng Shi
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.015908
Subject(s) - optics , trimming , photonic crystal , materials science , electron beam lithography , fabrication , wavelength , optoelectronics , electric field , beam (structure) , resist , physics , nanotechnology , medicine , alternative medicine , layer (electronics) , pathology , quantum mechanics , computer science , operating system
We demonstrate that resonant wavelength of photonic crystal (PhC) nanobeam cavities can be individually post-fabrication tuned by electron beam irradiation. By measuring the transmission spectrum of the cavities before and after trimming, it is shown that resonant wavelength shifts are proportional to the scanning time and the acceleration voltage. Furthermore, larger resonant wavelength shifts can be achieved by scanning the region where the electric field is highly localized. The measurement results show that the resonant wavelength difference can be reduced from 5.5 nm (before trimming) to 0.4 nm (after trimming), while the quality factor of the cavities can be maintained.