Open AccessRandom two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies
Author(s) -
Yu Zhang,
Xiaobo Tian,
Rongguang Liang
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.015059
Subject(s) - lissajous curve , ellipse , optics , phase (matter) , interferometry , amplitude , algorithm , phase modulation , computer science , least squares function approximation , continuous phase modulation , physics , mathematics , phase noise , geometry , statistics , telecommunications , quantum mechanics , estimator
To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA.