Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies | Zendy

Yu Zhang | Zendy; Xiaobo Tian | Zendy; Rongguang Liang | Zendy

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Random two-step phase shifting interferometry based on Lissajous ellipse fitting and least squares technologies

Author(s) -

Yu Zhang,

Xiaobo Tian,

Rongguang Liang

Publication year - 2018

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.26.015059

Subject(s) - lissajous curve , ellipse , optics , phase (matter) , interferometry , amplitude , algorithm , phase modulation , computer science , least squares function approximation , continuous phase modulation , physics , mathematics , phase noise , geometry , statistics , telecommunications , quantum mechanics , estimator

To accurately obtain the phase distribution of an optical surface under test, the accurate phase extraction algorithm is essential. To overcome the phase shift error, a random two-step phase shifting algorithm, which can be used in the fluctuating and non-uniform background intensity and modulation amplitude, Lissajous ellipse fitting, and least squares iterative phase shifting algorithm (LEF&LSI PSA), is proposed; pre-filtering interferograms are not necessary, but they can get relatively accurate phase distribution and unknown phase shift value. The simulation and experiment verify the correctness and feasibility of the LEF & LSI PSA.

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