Open AccessTwo-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer
Author(s) -
Lu Zhang,
Keqi Qi,
Yang Xiang
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.014267
Subject(s) - shearing interferometer , optics , interferometry , shearing (physics) , wavefront , grating , physics , rotation (mathematics) , astronomical interferometer , mathematics , geometry , thermodynamics
The grating lateral shearing interferometer may achieve ultra-high accuracy absolute testing after eliminating the systemic errors from the interferometer itself and the orthogonality problem between two shearing directions. Aiming at the interferometer, we proposed a two-step algorithm for removing the rotationally asymmetric systemic errors from our shearing setup. This rotation method provides a new approach for acquiring the wavefront aberration by choosing the rotation angles with the minimum decentration and to satisfy the immune of systemic errors at the same time. Simulation and experiment verified that it is more propitious to eliminate the systemic errors when it is applied to our shearing setup.