Open AccessSilicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method
Author(s) -
Jason C. C. Mak,
Quentin Wilmart,
S. Olivier,
Sylvie Menezo,
Joyce K. S. Poon
Publication year - 2018
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.013656
Subject(s) - materials science , wafer , silicon nitride , grating , optics , bandwidth (computing) , fabrication , optoelectronics , silicon , telecommunications , computer science , medicine , physics , alternative medicine , pathology
Silicon nitride-on-silicon bi-layer grating couplers were designed for the O-band using an optimization-based procedure that accounted for design rules and fabricated on a 200 mm wafer. The designs were sufficiently robust to fabrication variations to function well across the wafer. A peak fiber-to-chip coupling efficiency to standard single mode fiber of -2.2 dB and a 1-dB bandwidth of 72.9 nm was achieved in the representative device. Over several chips across the wafer, we measured a median peak coupling efficiency of -2.1 dB and median 1-dB bandwidth of 70.8 nm. The measurements had good correspondence with simulation.