Open AccessBeam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging
Author(s) -
Patrick Helfenstein,
Rajendran Rajeev,
Iacopo Mochi,
Armin Kleibert,
C. A. F. Vaz,
Yasin Ekinci
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.012242
Subject(s) - extreme ultraviolet lithography , optics , extreme ultraviolet , ptychography , lithography , coherent diffraction imaging , coherence (philosophical gambling strategy) , reflection (computer programming) , wavelength , image quality , materials science , sample (material) , physics , phase retrieval , diffraction , computer science , laser , fourier transform , programming language , quantum mechanics , artificial intelligence , image (mathematics) , thermodynamics