Open AccessBeam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging
Author(s) -
Patrick Helfenstein,
Rajeev Rajendran,
Iacopo Mochi,
Armin Kleibert,
C. A. F. Vaz,
Yasin Ekinci
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.012242
Subject(s) - optics , extreme ultraviolet lithography , coherence (philosophical gambling strategy) , physics , coherent diffraction imaging , extreme ultraviolet , ptychography , coherence theory , diffraction , coherence time , mode (computer interface) , spatial coherence , beam (structure) , coherence length , phase retrieval , fourier transform , laser , superconductivity , operating system , quantum mechanics , computer science
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