Flexible and tunable terahertz all-dielectric metasurface composed of ceramic spheres embedded in ferroelectric/ elastomer composite

Terahertz (THz) all-dielectric metasurfaces made of high-index and low-loss resonators have attracted more and more attention due to their versatile properties. However, the all-dielectric metasurfaces in THz suffer from limited bandwidth and low tunability. Meanwhile, they are usually fabricated on flat and rigid substrates, and consequently their applications are restricted. Here, a simple approach is proposed and experimentally demonstrated to obtain a flexible and tunable THz all-dielectric metasurface. In this metasurface, micro ceramic spheres (ZrO 2 ) are embedded in a ferroelectric (strontium titanate) / elastomer (polydimethylsiloxane) composite. It is shown that the Mie resonances in micro ceramic spheres can be thermally and reversibly tuned resulting from the temperature dependent permittivity of the ferroelectric / PDMS composite. This metasurface characterized by flexibility and tunability is expected to have a more extensive application in active THz devices.