Open AccessCVD SiC deformable mirror with monolithic cooling channels
Author(s) -
Kyohoon Ahn,
Hyug-Gyo Rhee,
HoSoon Yang,
Hagyong Kihm
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.009724
Subject(s) - materials science , silicon carbide , coolant , optics , stack (abstract data type) , adaptive optics , fabrication , deformable mirror , microheater , actuator , optoelectronics , mechanical engineering , composite material , medicine , physics , alternative medicine , electrical engineering , pathology , computer science , engineering , programming language
We propose a novel deformable mirror (DM) for adaptive optics in high power laser applications. The mirror is made of a Silicon carbide (SiC) faceplate, and cooling channels are embedded monolithically inside the faceplate with the chemical vapor desposition (CVD) method. The faceplate is 200 mm in diameter and 3 mm in thickness, and is actuated by 137 stack-type piezoelectric transducers arranged in a square grid. We also propose a new actuator influence function optimized for modelling our DM, which has a relatively stiffer faceplate and a higher coupling ratio compared with other DMs having thin faceplates. The cooling capability and optical performance of the DM are verified by simulations and actual experiments with a heat source. The DM is proved to operate at 1 kHz without the coolant flow and 100 Hz with the coolant flow, and the residual errors after compensation are less than 30 nm rms (root-mean-square). This paper presents the design, fabrication, and optical performance of the CVD SiC DM.