Open AccessPure adaptive interferometer for free form surfaces metrology
Author(s) -
Lei Zhang,
Sheng Zhou,
Dong Liu,
Yu Liu,
Tianbo He,
Benli Yu,
Jingsong Li
Publication year - 2018
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.007888
Subject(s) - interferometry , optics , metrology , astronomical interferometer , surface metrology , surface (topology) , physics
A pure adaptive interferometer is proposed for optical free form surfaces metrology without auxiliary devices such as the wavefont sensors and deflectometry systems for DM monitoring. In this method, the DM surface monitoring and free form surface measurement are achieved simultaneously in only one interferometer. The polarizing optics divide the interferometer into two partial common path interferometric system, which provide the null test for tested free form surface and non-null test for the DM surface. The final figure error of the free form surface is extracted by ray tracing. Experiments proving the feasibility of this interferometer is shown.