Open AccessInterferometric snapshot spectro-ellipsometry
Author(s) -
Vamara Dembele,
Moonseob Jin,
Inho Choi,
Won Chegal,
Daesuk Kim
Publication year - 2018
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.001333
Subject(s) - ellipsometry , optics , snapshot (computer storage) , interferometry , materials science , phase modulation , thin film , polarization (electrochemistry) , refractive index , computer science , physics , phase noise , chemistry , nanotechnology , operating system
We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.