Open AccessLaser heterodyne interferometer with rotational error compensation for precision displacement measurement
Author(s) -
Enzheng Zhang,
Benyong Chen,
Zhengping Hao,
Liping Yan,
Xueying Teng
Publication year - 2018
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.26.000090
Subject(s) - optics , interferometry , angular displacement , displacement (psychology) , physics , observational error , beam splitter , astronomical interferometer , heterodyne (poetry) , compensation (psychology) , laser , rotation (mathematics) , acoustics , computer science , psychology , statistics , mathematics , psychoanalysis , psychotherapist , artificial intelligence
A laser heterodyne interferometer with rotational error compensation is proposed for precision displacement measurement. In this interferometer, the rotational error of the measured object is obtained by using an angle detecting unit which is composed of a semi-reflective film, a polarizing beam splitter, a quarter-wave plate, a convex lens and a two-dimensional position sensitive detector. And the obtained rotational angle is used for compensating its influence on displacement measurement result. The optical configuration of the proposed interferometer is designed, and the mathematical model for displacement measurement with rotational error compensation is established. The coupling effect of axial displacement on rotational angle measurement and the rotational angle range used for compensation on displacement measurement are discussed in detail. To verify feasibility of the proposed interferometer, the experimental setup was constructed and several verification experiments were performed.