Open AccessBroad-band difference interferometer as a refractive index sensor
Author(s) -
K. Gut
Publication year - 2017
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.031111
Subject(s) - interferometry , optics , refractive index , miniaturization , microelectronics , waveguide , materials science , optoelectronics , physics , nanotechnology
Integrated Optical Broad-Band Difference Interferometer (IO BB DI) is introduced as an alternative and economical measurement method to integrated optical label-free affinity sensors. A detailed theoretical analysis of the method is presented and the effects of the waveguide layer on the operation of the system are shown. A very short operating distance of less than 0.5 mm allows miniaturization of the interferometer. The analysis was performed for Si 3 N 4 /SiO 2 layers that can be obtained in standard microelectronics technological processes.