Open AccessFringe-print-through error analysis and correction in snapshot phase-shifting interference microscope
Author(s) -
Yu Zhang,
Xiaobo Tian,
Rongguang Liang
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.026554
Subject(s) - snapshot (computer storage) , optics , interference microscopy , interferometry , computer science , interference (communication) , correctness , error analysis , error detection and correction , microscope , algorithm , observational error , physics , mathematics , telecommunications , channel (broadcasting) , statistics , operating system
To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm.