Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope | Zendy

Yu Zhang | Zendy; Xiaobo Tian | Zendy; Rongguang Liang | Zendy

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Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope

Author(s) -

Yu Zhang,

Xiaobo Tian,

Rongguang Liang

Publication year - 2017

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.25.026554

Subject(s) - snapshot (computer storage) , optics , interference microscopy , interferometry , computer science , interference (communication) , correctness , error analysis , error detection and correction , microscope , algorithm , observational error , physics , mathematics , telecommunications , channel (broadcasting) , statistics , operating system

To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm.

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