Open AccessSelf-calibration of Fizeau interferometer and planar scale gratings in Littrow setup
Author(s) -
Xiuguo Chen,
Yuki Shimizu,
Xin Xiong,
Yuan Liu Chen,
Wei Gao
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.021567
Subject(s) - fizeau interferometer , optics , planar , interferometry , grating , flatness (cosmology) , wavefront , calibration , diffraction grating , diffraction , physics , astronomical interferometer , computer science , computer graphics (images) , cosmology , quantum mechanics
A new method, in which the wavefronts of the zero-order and the positive and negative first-order diffracted beams from a planar scale grating in Littrow setup are analyzed by a Fizeau interferometer, is proposed to evaluate the Z-directional out-of-flatness as well as the X- and Y-directional pitch deviations of the planar scale grating over a large area. Meanwhile, the surface profile of the reference optical flat in the Fizeau interferometer can also be determined in a much simpler and more efficient approach than the commonly used liquid-flat reference and three-flat test calibration methods. Simulations are presented to verify the feasibility of the proposed method.