Femtosecond laser direct generation of 3D-microfluidic channels inside bulk PMMA

We report on laser direct generation of 3D-microchannels for microfluidic applications inside PMMA bulk material by focused femtosecond pulses. Inner lying channels with cross sectional areas from 100 µm 2 to 4400 µm 2 are directly created in the volume of a PMMA substrate. Using the presented process, the channel length is fundamentally unlimited. Here we demonstrate a channel length of 6 meters inside a substrate with dimensions of 20 × 20 × 1.1 mm. The formation of the micro channels is based on nonlinear absorption around the focal volume that triggers a material modification. The modified volume can be selectively opened to form the channel by a subsequent annealing process. The cross section of the channel is strongly influenced by the energy distribution and illumination around the focal volume determined by the optical setup and process design. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stage, allowing freely chosen complex shaped channel architectures. Within a comprehensive parameter study, varying laser power, number of multi-passes, writing speed and writing depths, we identify an optimized process in terms of attainable channel height, width and aspect ratio, as well as process stability and reproducibility. The proof of concept for an application in three dimensional microfluidic systems is provided by florescence microscopy using a dye rhodamine B solution in isopropanol.