Open AccessVertex radius of curvature error measurement of aspheric surface based on slope asphericity in partial compensation interferometry
Author(s) -
Qun Hao,
Tengfei Li,
Yao Hu,
Shaopu Wang,
Ning Yan,
Yifeng Tan,
Xinmu Zhang
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.018107
Subject(s) - optics , interferometry , radius , curvature , vertex (graph theory) , radius of curvature , compensation (psychology) , surface (topology) , observational error , approximation error , physics , materials science , mathematics , geometry , computer science , mathematical analysis , mean curvature , psychology , graph , computer security , statistics , discrete mathematics , mean curvature flow , psychoanalysis
Vertex radius of curvature (VROC) is an important shape parameter used to determine the properties of an optical aspheric surface. Precise measurement of VROC error is critical for manufacturing and aligning optical aspheric surfaces. This paper introduces VROC error measurement of aspheric surface by using slope asphericity with partial compensation interferometry. VROC error and the decoupled surface figure error (SFE) can be simultaneously measured. Experimental results indicate that the method exhibits relative measurement accuracy of 0.01% when the nominal VROC is 889 mm, and the decoupled SFE error is λ/10 of the peak-to-valley value.