Open AccessHolographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder
Author(s) -
Xinghui Li,
Qian Zhou,
Xiaogang Zhu,
Haiou Lu,
Lin Yang,
Dongsheng Ma,
Jianhui Sun,
Kai Ni,
Xiaohao Wang
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.016028
Subject(s) - optics , grating , image stitching , fabrication , holography , materials science , beam splitter , holographic grating , lithography , diffraction grating , encoder , laser diode , laser , optoelectronics , physics , computer science , medicine , alternative medicine , pathology , operating system
We present a method for the fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder using a dual-beam interference lithography (IL) system with a compact diode laser source. We employ a multiple-exposure stitching method to form an arrayed scale grating. This allows a scale grating with small line spacing to be achieved over a large width. This stitched scale grating integrates well with a newly developed two-probe optical encoder, allowing the measurement results to be numerically connected. Since neither the gap width nor the grating phase of the two adjacent gratings must be controlled, the fabrication process is both simplified and made more robust. This flexible and cost-effective fabrication technique can benefit many precision measurement applications. Experiments are carried out to demonstrate the feasibility of this technology.