z-logo
open-access-imgOpen Access
Maximum contributed component regression for the inverse problem in optical scatterometry
Author(s) -
Haiping Zhu,
YoungJoo Lee,
Hongming Shan,
Junping Zhang
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.015956
Subject(s) - inverse problem , inverse , microelectronics , artificial neural network , computer science , pairwise comparison , component (thermodynamics) , algorithm , process (computing) , data mining , mathematical optimization , artificial intelligence , mathematics , engineering , physics , mathematical analysis , geometry , electrical engineering , thermodynamics , operating system
Scatterometry has been widely applied in microelectronic manufacturing process monitoring. As a key part in scatterometry, inverse problem uses scatter signature to determine the shape of profile structure. The most common solutions for the inverse problem are model-based methods, such as library search, Levenberg-Marquardt algorithm and artificial neural network (ANN). However, they all require a pre-defined geometric model to extract 3D profile of the structure. When facing the complex structure in manufacturing process monitoring, the model-based methods will cost a long time and may fail to build a valid geometric model. Without the assumption of the geometric model, model-free methods are developed to find a mapping between profile parameter named label Y and corresponding spectral signature X. These methods need lots of labeled data obtained from transmission electron microscopy (TEM) or cross-sectional scanning electron microscopy (XSEM) with time-consuming and highly cost, leading to the increase of production costs. To address these issues, this paper develops a novel model-free method, called maximum contributed component regression (MCCR). It utilizes canonical correlation analysis (CCA) to estimate the maximum contributed components from pairwise relationship of economic unlabeled data with few expensive labeled data. In MCCR, the maximum contributed components are used to guide the solution of the inverse problem based on the conventional regression methods. Experimental results on both synthetic and real-world semiconductor datasets demonstrate the effectiveness of the proposed method given small amount of labeled data.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.
Having issues? You can contact us here