Open AccessData processing for point-based in situ metrology of freeform optical surface
Author(s) -
Yu Zhang,
Hao Cheng,
Rengmao Wu,
Rongguang Liang
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.013414
Subject(s) - metrology , correctness , coordinate measuring machine , computer science , optics , surface metrology , coordinate system , point (geometry) , process (computing) , matching (statistics) , surface (topology) , data processing , algorithm , computer vision , engineering , mathematics , mechanical engineering , physics , surface finish , geometry , profilometer , statistics , operating system
Freeform surfaces are widely used in advanced optical systems and the point-based metrology methods are often used for freeform surface measurement. In order to accurately process the measured data from point-based metrology system, the coordinate matching and surface fitting are essential. To ensure the matching efficiency and accuracy, we use a two-step coordinate matching method: pre-adjustment and accurate adjustment. We also develop an improved Newton iterative (INI) fitting algorithm to generate initial value and improve the fitting speed. The simulation and experiment verify the correctness and feasibility of the data processing.