Open AccessHard x-ray scanning imaging achieved with bonded multilayer Laue lenses
Author(s) -
Xiaojing Huang,
Weihe Xu,
Evgeny Nazaretski,
Nathalie Bouet,
Juan Zhou,
Yong S. Chu,
Hongyuan Yan
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.008698
Subject(s) - optics , ptychography , materials science , resolution (logic) , x ray optics , image resolution , diffraction , x ray , physics , computer science , artificial intelligence
We report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm 2 . By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm 2 and an object image with a resolution of 13 × 13 nm 2 . The significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.