Open AccessTuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror
Author(s) -
Jessica Morrison,
Matthias Imboden,
David J. Bishop
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.007895
Subject(s) - optics , degeneracy (biology) , tilt (camera) , resonance (particle physics) , physics , coupling (piping) , degenerate energy levels , materials science , atomic physics , mechanical engineering , bioinformatics , quantum mechanics , engineering , metallurgy , biology
The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scanning micromirrors require frequency stability in order to perform imaging and projection functions properly. This paper suggests a method to tune the tip and tilt resonant frequencies in real time while actively suppressing or allowing degeneracy of the two modes in a symmetric electrothermal micromirror. We show resonant frequency tuning with a range of degeneracy separation of 470 Hz or by approximately ±15% and controllable coupling.