Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror | Zendy

Jessica Morrison | Zendy; Matthias Imboden | Zendy; D. J. Bishop | Zendy

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Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror

Author(s) -

Jessica Morrison,

Matthias Imboden,

D. J. Bishop

Publication year - 2017

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.25.007895

Subject(s) - optics , degeneracy (biology) , tilt (camera) , resonance (particle physics) , physics , coupling (piping) , degenerate energy levels , materials science , atomic physics , mechanical engineering , bioinformatics , quantum mechanics , engineering , metallurgy , biology

The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scanning micromirrors require frequency stability in order to perform imaging and projection functions properly. This paper suggests a method to tune the tip and tilt resonant frequencies in real time while actively suppressing or allowing degeneracy of the two modes in a symmetric electrothermal micromirror. We show resonant frequency tuning with a range of degeneracy separation of 470 Hz or by approximately ±15% and controllable coupling.

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