Fast and full range measurements of ellipsometric parameters using a 45° dual-drive symmetric photoelastic modulator | Zendy

Li Kewu | Zendy; Rui Zhang | Zendy; Ning Jing | Zendy; Youhua Chen | Zendy; Minjuan Zhang | Zendy; Liming Wang | Zendy; Zhibin Wang | Zendy

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Fast and full range measurements of ellipsometric parameters using a 45° dual-drive symmetric photoelastic modulator

Author(s) -

Li Kewu,

Rui Zhang,

Ning Jing,

Youhua Chen,

Minjuan Zhang,

Liming Wang,

Zhibin Wang

Publication year - 2017

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.25.005725

Subject(s) - optics , modulation (music) , repeatability , range (aeronautics) , optical modulator , physics , sensitivity (control systems) , dynamic range , materials science , phase modulation , acoustics , electronic engineering , chemistry , chromatography , phase noise , composite material , engineering

The fast and full range measurements of ellipsometric parameters ψ and Δ using a 45° dual-drive symmetric photoelastic modulator (PEM) are proposed. The PEM operates in a pure traveling modulation mode with a constant retardation magnitude and the modulation axis performing circular motion. A field programmable gate array is used to control the PEM and fulfill the data processing. The parameters sin 2ψ sinΔ, sin 2ψ cosΔ, and sin 2ψ can be measured simultaneously, providing accurate measurements of ψ and Δ over the full range. The experimental results show that the repeatability and sensitivity of this system are at 10 -3° , and the data acquisition rate is 1 ms/point.

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