Open AccessHighly sensitive, wide dynamic range displacement sensor combining chromatic confocal system and phase-sensitive spectral optical coherence tomography
Author(s) -
Bo Dong,
Yun Zhang,
Wucong Zhang,
Zhaoshui He,
Shengli Xie,
Yanzhou Zhou
Publication year - 2017
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.25.005426
Subject(s) - optics , optical coherence tomography , dynamic range , michelson interferometer , interferometry , confocal , physics , signal (programming language) , displacement (psychology) , interference (communication) , materials science , superluminescent diode , computer science , telecommunications , psychology , channel (broadcasting) , psychotherapist , programming language
A displacement sensor with nanometer-sensitivity and a submillimeter dynamic range is proposed. It integrates a chromatic confocal system and phase-sensitive spectral optical coherence tomography (PhS-SOCT) into the fiber-based Michelson interferometer and codes interference and confocal signals with spectral multiplexing. A displacement is evaluated using depth-resolved phase information decoded from the interference signal, which is unwrapped based on the position information decoded from the confocal signal. A sensor system with a 0.102mm dynamic range was built to validate the method. The temperature induced sample surface displacement was measured with a root mean square error of 3.9nm.