Open AccessModeling framework for piezoelectrically actuated MEMS tunable lenses
Author(s) -
Mahmoud A. Farghaly,
Muhammad Nadeem Akram,
Einar Halvorsen
Publication year - 2016
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.028889
Subject(s) - optics , actuator , lens (geology) , optical transfer function , microelectromechanical systems , paraxial approximation , voltage , ray tracing (physics) , materials science , coupling (piping) , piezoelectricity , acoustics , physics , computer science , optoelectronics , beam (structure) , quantum mechanics , artificial intelligence , metallurgy
WWe report a modeling framework for evaluating the performance of piezoelectrically actuated MEMS tunable lenses. It models the static opto-electromechanical coupling for symmetric configurations of piezoelectric actuators based on the laminated-plate theory, linear piezoelectricity, and ray tracing. With these assumptions, it helps to find geometrical parameters for actuators on clamped square or circular diaphragms that give a diffraction-limited tunable lens with minimum F-number. The tunable lens' optical performance and its focusing capability, alone and in combination with a paraxial fixed lens, were calculated in terms of object distance and actuation voltage. Using the modeling framework, we confirmed that the modulation transfer function for objects located at different distances remains the same after voltage adjustment.