Open AccessUniversal evaluation of combined standard uncertainty for rotating-element spectroscopic ellipsometers
Author(s) -
Yong Jai Cho,
Won Chegal,
Jeong Pyo Lee,
Hyun Mo Cho
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.026215
Subject(s) - metrology , element (criminal law) , measurement uncertainty , standardization , expression (computer science) , instrumentation (computer programming) , optics , computer science , mathematics , physics , algorithm , quantum mechanics , political science , law , programming language , operating system
We present for the first time a universal expression for the combined standard uncertainty for all types of rotating-element spectroscopic ellipsometers (RE-SEs). Specifically, we introduce general model functions as universal analytic expressions for the combined standard uncertainties of the ellipsometric sample parameters. The model functions are expressed as functions of influencing quantities that are not known exactly. The detailed expressions for the model functions are provided for the common RE-SEs. Our approach can be used for instrumentation, standardization, simulation, metrology, optimization of measurement conditions, and performance comparison between RE-SEs.