Open AccessSilicon-based multilayer gratings with a designable narrowband absorption in the short-wave infrared
Author(s) -
Xiaoyi Liu,
Jinsong Gao,
Haijian Yang,
Xiaoyi Wang,
Jing Zhao
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.025103
Subject(s) - materials science , optics , narrowband , grating , infrared , absorption (acoustics) , microstructure , optoelectronics , silicon , diffraction grating , physics , metallurgy , composite material
We demonstrate an Al/Si multilayer-grating microstructure covered on Si substrate. This microstructure presents a designable narrowband absorption in short-wave infrared (SWIR) waveband (2.0 μm-2.3 μm). We investigate its absorption mechanism by both modeling and simulations, and explain the results well with metal-insulator-metal and Fabry-Perot cavity theory. Furthermore, we present the absorption of fabricated multilayer-grating microstructure through experiment, and discuss the influence of structure's lateral angle on its absorption in detail. This work provides the possibility to design Si-based devices with designable working bands in SWIR spectrum.