Open AccessPrecise measurement of micro bubble resonator thickness by internal aerostatic pressure sensing
Author(s) -
Qiwei Lu,
Jie Liao,
Sheng Liu,
Xiang Wu,
Liying Liu,
Lei Xu
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.020855
Subject(s) - bubble , optics , materials science , resonator , pressure measurement , measure (data warehouse) , internal pressure , acoustics , system of measurement , physics , mechanics , mechanical engineering , computer science , composite material , engineering , database , astronomy
We develop a new, simple and non-destructive method to precisely measure the thickness of thin wall micro bubble resonators (MBRs) by using internal aerostatic pressure sensing. Measurement error of 1% at a bubble wall thickness of 2 μm is achieved. This method is applicable to both thin wall and thick wall MBR with high measurement accuracy.