Open AccessDual-wavelength digital holography with a single low-coherence light source
Author(s) -
Sungbin Jeon,
Janghyun Cho,
Ji Nan Jin,
No Cheol Park,
Young Pil Park
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.018408
Subject(s) - optics , coherence (philosophical gambling strategy) , holography , digital holography , speckle pattern , superluminescent diode , interferometry , wavelength , speckle noise , holographic interferometry , optical coherence tomography , digital micromirror device , physics , materials science , quantum mechanics
We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.