Open AccessWideband multilayer gratings for the 17–25 nm spectral region
Author(s) -
Xiaowei Yang,
И. В. Кожевников,
Qiushi Huang,
Hongchang Wang,
Kawal Sawhney,
Zhanshan Wang
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.015079
Subject(s) - optics , wideband , diffraction efficiency , diffraction , diffraction grating , materials science , broadband , grating , rigorous coupled wave analysis , optoelectronics , physics
An approach to designing wideband blazed multilayer gratings is introduced and applied to gratings operating at 17-25 nm. We demonstrate single-order operation of broadband multilayer gratings, despite their very wide spectral and angular bandpass, when only one diffraction wave is excited and the diffraction efficiency reaches the reflectivity of a conventional depth-graded multilayer mirror, eliminating overlapping of different-order diffraction waves. The selection principles for the geometrical parameters of gratings are discussed. We formulate a "law of similarity" for wideband gratings that allows us to design gratings with different geometrical parameters but practically the same spectral dependence of the diffraction efficiency.