
Far-field, linewidth and thermal characteristics of a high-speed 1550-nm MEMS tunable VCSEL
Author(s) -
Sujoy Paul,
Mohammad Haidar,
Julijan Cesar,
Mohammadreza Malekizandi,
Benjamin Kögel,
Christian Neumeyr,
M. Ortsiefer,
Franko Küppers
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.013142
Subject(s) - laser linewidth , materials science , vertical cavity surface emitting laser , optoelectronics , microelectromechanical systems , optics , laser , physics
We report an electrically pumped 1550 nm MEMS tunable VCSEL with a continuous tuning of 101 nm at 22 °C. The top MEMS-DBR with built-in stress gradient within the dielectric layers is deposited in a low-temperature PECVD chamber on an InP-based half-VCSEL, structured by surface-micromachining and electrothermally actuated for continuous wavelength tuning. With 2.6 mA threshold current, the laser shows maximum CW output power of 3.2 mW at 1560 nm. The MEMS-VCSEL operates in single-mode with SMSR > 39 dB across the entire tuning range. At 36 °C, the tuning range reaches up to 107 nm. The divergence angle of the MEMS-VCSEL is approximately 5.6° for all tuning wavelengths. The intrinsic linewidth of an unpackaged device is 21 MHz. Quasi-error-free operation at 12.5 Gbps using a directly modulated MEMS-VCSEL is reported for a record 60 nm tuning, showing the potential of the so-called colorless source in WDM applications.