Open AccessSilicon photonic waveguide metrology using Mach-Zehnder interferometers
Author(s) -
Claudio J. Otón,
Costanza Lucia Manganelli,
F. Bontempi,
Maryse Fournier,
Daivid Fowler,
Christophe Kopp
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.006265
Subject(s) - optics , astronomical interferometer , resonator , silicon on insulator , wafer , metrology , silicon photonics , mach–zehnder interferometer , photonics , materials science , waveguide , interferometry , fabrication , optoelectronics , silicon , physics , medicine , alternative medicine , pathology
We propose a procedure for characterizing fabrication deviations within a chip and among different chips in a wafer in silicon photonics technology. In particular, independent measurements of SOI thickness and waveguide width deviations can be mapped through the wafer, allowing a precise and non-destructive characterization of how these variations are distributed along the surface of the wafer. These deviations are critical for most wavelength-dependent integrated devices, like microring resonators, filters, etc. We also show that the technique allows for the characterization of proximity effects.