Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing | Zendy

Martin Völk | Zendy; Sergiy Suntsov | Zendy; Christian E. Rüter | Zendy; Detlef Kip | Zendy

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Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing

Author(s) -

Martin Völk,

Sergiy Suntsov,

Christian E. Rüter,

Detlef Kip

Publication year - 2016

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.24.001386

Subject(s) - lithium niobate , wafer dicing , materials science , wafer , diamond , optics , fabrication , thin film , optoelectronics , composite material , nanotechnology , medicine , physics , alternative medicine , pathology

We report on the fabrication and characterization of ridge waveguides in lithium niobate thin films by diamond blade dicing. The lithium niobate thin films with a thickness of 1 µm were fabricated by bonding a He-implanted lithium niobate wafer to a SiO(2)-coated lithium niobate wafer and crystal ion slicing. Propagation losses of 1.2 dB/cm for TE and 2.8 dB/cm for TM polarization were measured at 1550 nm for a 9.28 mm long and 2.1 µm wide waveguide using the Fabry-Perot method.

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