Open AccessLow loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing
Author(s) -
Martin Völk,
Sergiy Suntsov,
Christian E. Rüter,
Detlef Kip
Publication year - 2016
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.24.001386
Subject(s) - lithium niobate , wafer dicing , materials science , wafer , optics , fabrication , diamond , thin film , optoelectronics , composite material , nanotechnology , medicine , physics , alternative medicine , pathology
We report on the fabrication and characterization of ridge waveguides in lithium niobate thin films by diamond blade dicing. The lithium niobate thin films with a thickness of 1 µm were fabricated by bonding a He-implanted lithium niobate wafer to a SiO(2)-coated lithium niobate wafer and crystal ion slicing. Propagation losses of 1.2 dB/cm for TE and 2.8 dB/cm for TM polarization were measured at 1550 nm for a 9.28 mm long and 2.1 µm wide waveguide using the Fabry-Perot method.