Open AccessRapid 3D µ-printing of polymer optical whispering-gallery mode resonators
Author(s) -
Jushuai Wu,
Xin Guo,
A. Ping Zhang,
Hwa Yaw Tam
Publication year - 2015
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.23.029708
Subject(s) - whispering gallery wave , resonator , materials science , microfabrication , optics , optoelectronics , photoresist , fabrication , optical fiber , optical power , polymer , nanotechnology , laser , physics , medicine , alternative medicine , pathology , layer (electronics) , composite material
A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.