Rapid 3D µ-printing of polymer optical whispering-gallery mode resonators | Zendy

Jushuai Wu | Zendy; Xin Guo | Zendy; A. Ping Zhang | Zendy; HwaYaw Tam | Zendy

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Rapid 3D µ-printing of polymer optical whispering-gallery mode resonators

Author(s) -

Jushuai Wu,

Xin Guo,

A. Ping Zhang,

HwaYaw Tam

Publication year - 2015

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.23.029708

Subject(s) - whispering gallery wave , resonator , materials science , microfabrication , optics , optoelectronics , photoresist , fabrication , optical fiber , optical power , polymer , nanotechnology , laser , physics , medicine , alternative medicine , pathology , layer (electronics) , composite material

A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.

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